NiagaraUP

Cleanroom-ready with VIT technology

The NiagaraUP is ideal for applications in the semiconductor, optics, medical technology and precision engineering industries – wherever the highest level of cleanliness is required in the smallest possible space. Equipped with BvL’s innovative Vacuum Impulse Technology (VIT), the NiagaraUP meets the most demanding requirements on particulate, molecular, filmic, and even atomic levels. All process steps are carried out space-efficiently in a single chamber. The system is available in various sizes and configurations and can be seamlessly integrated into cleanroom environments.

Basic system
Cleaning system: Spray cleaning: Rotating or swiveling holder system with customized adjustment of the nozzles and nozzle frames

Flood cleaning: Stepless partial flooding, full/vacuum flooding, recirculating flooding

Ultrasonic cleaning: e.g., 40, 80, and 132 kHz, multi-frequency systems, ultrasonic generators with sweep function for delicate geometries

Vacuum Impulse Technology (VIT): special deep cleaning for complex component geometries
CleanDesign Electropolished surfaces and rounded chamber design to avoid contamination areas
Measures for safe process operation Automatic chamber cleaning with UPW ultrapure water, rapid complete draining, and further processes to prevent cross-contamination
Functional principle Rotating ferris wheel system for all-round cleaning
Number of tanks Modular with single-and multi-tank systems
Energy efficiency Insulation and intelligent control system
Loading Front loading via roller-guided holder device
Housing Modern design made of high-quality stainless steel – front panel with refined surface finishing (optional)
Media-carrying components Cleanroom-compliant without HIO elements
Air filter for chamber ventilation and drying HEPA H 13 filter
Control and operation Siemens Simatic with modern and userfriendly Siemens touch panel
Areas of application and advantages
  • Very high cleanliness requirements: Grade 4 to 1
  • Compact design for space-saving installation
  • Cleanroom integration possible
  • State-of-the-art system to prevent recontamination and cross-contamination
  • Innovative process: Vacuum Impulse Technology (VIT)
  • Modular design: Expansion of tanks and cleaning chambers possible
  • Individually selectable program sequences: both process step order and choice of times and parameters
  • Flexible use: as pre-cleaner or final washer
  • Service-friendly: easy accessibility of tanks and components

Technology in detail

The cleaning process takes place in a single chamber and can be individually configured in multiple stages:

  • Spray cleaning
  • Flood cleaning (stepless partial flooding, full/vacuum flooding, recirculation flooding)
  • Ultrasonic cleaning (single or multi-frequency systems)
  • Innovative BvL vacuum pulse technology (deep cleaning for capillary component structures, boreholes, and internal channels)
  • Efficient chamber cleaning with UPW water (ultra-pure water) between treatment steps
  • Continuous filtration
  • Rapid and complete draining
  • Drying process – alternative or combinable: Circulation air, hot air with HEPA H13 filter, infrared drying, vacuum drying
  • Cleanroom option

  • Additional tanks and chambers

  • Various handling and automation systems

  • Cooling and demagnetization systems